S-LMS: SINGLE LASER MICROSCOPE STATION

The Single Spot Laser Station is an optical and mechanical system allowing to focus a single-mode laser source on a chip with high transmission (>92%) and with extremely small spot size (down to 1µm).

Perfectly adapted for laser fault injection, this platform integrates a high resolution IR vision offering the possibility to see the path of the chip and the laser spot through the silicon. Mounted on high precision XYZ stages on a marble arch, the user can program scans above the sample with high precision and high resolution.

Key features:

• → Adapted for single-mode laser at 976 and 1064nm

• → High transmission (>92%) without objectives

• → Minimum spot size (down to 1µm)

• → IR high resolution vision 

• → Marble arch with high stability

• → Large range of objectives

Options:

• → Laser safety enclosure with CE certification

• → Second spot with bare fiber from the side

• → Tilt and rotation stage

• → Bespoke dimensions

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